| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for refining a boron-containing silicon using electron beam capable of efficiently removing the boron and of suppressing the oxidation of the silicon. SOLUTION: A high purity silicon ingot can be obtained by fusing a boron-containing silicon through irradiation of an electron beam in a vacuum vessel 1, then converting the boron contained in the fused silicon into a boron oxide by oxidizing the boron through introduction of H<SB>2</SB>O into the vacuum vessel 1 and vaporizing the boron oxide, and solidifying the silicon by terminating the irradiation of the electron beam after the boron oxide having been vaporized. COPYRIGHT: (C)2006,JPO&NCIPI
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