Method and apparatus for making continuous films of a single crystal material

摘要

A method for making continuous film of single crystal material by crystal deposition. The method includes providing a single crystal template ribbon formed as a continuous loop; epitaxially depositing a sacrificial layer on the single crystal template ribbon by passing the single crystal template ribbon through a first process chamber; passing the single crystal template ribbon with the sacrificial layer epitaxially deposited thereon through a second processing chamber, wherein a final layer including a single crystal material is epitaxially deposited thereon; and passing the single crystal template ribbon with the sacrificial layer and the final layer epitaxially deposited thereon through a third processing chamber, thereby removing the sacrificial layer and detaching the final layer, which is the continuous film of a single crystal material.