| 摘要 |
A positioning device for positioning an object table relative to a reference frame with a drive unit including a first part connectable to the reference frame and a second part for holding the object table is described. The drive unit is constructed to displace the object table in a first direction by generating a force in the first direction on the second part, and a torque acting on the second part about an axis substantially perpendicular to the first direction such that the resulting force of the force and the torque is directed substantially through the center of gravity of the assembly including the object table and the second part.
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