| 摘要 |
<p>A container (3) airtightly stores items, such as semiconductor wafers and liquid-crystal display panels, which are required to be carried with their surfaces kept uncontaminated. Container carrying equipment is used to carry the container (3) between a plurality of processing equipment (1-n) within a bay area. The container carrying equipment is provided with conveyers (5), which are arranged along the arrangement lines of the equipment (1-n)on the ceiling space within the bay area and transfer the container (3) in a condition where the container (3)is placed on a palette (6). The container carrying equipment is also provided with a lifting equipment (7), which is provided for each load port (4) of the equipment (1-n) arranged in the downstream of the conveyer (5) and lifts the container (3) between the load port (4) and the conveyer (5), and a palette inserting/removing means (20), which inserts and removes the palette (6) to and from the conveyer (5). The space within the bay area can be made more compact and the container can be carried more stably and safely.</p> |
