| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem in which thermal stress is apt to occurs in a corrosion resistant surface of a corrosion resistant member, particles or cracks are apt to occur with use for a long period of time, or the like when the corrosion resistant surface is exposed to a plasma of a corrosive gas. <P>SOLUTION: At least the corrosion resistant surface of the corrosion resistant member to be exposed to a corrosive gas or the plasma of the gas contains cubic yttrium oxide as a main component, and contains monoclinic yttrium oxide. When the peak intensity assigned to the (222) plane of the cubic yttrium oxide in X-ray diffraction of the corrosion resistant surface is defined as I<SB>C222</SB>and the peak intensity assigned to the (40-2) plane of the monoclinic yttrium oxide is defined as I<SB>M40-2</SB>, I<SB>M40-2</SB>/I<SB>C222</SB>is set to be ≤0.1. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
