| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of incorrect setting in individual control parameter setting by displaying recipe editing information such as an ID number on an individual control parameter setting picture when a recipe editing picture is switched to the individual control parameter setting picture such as a soft gas pattern picture. SOLUTION: A substrate processor sets a control parameter at every step, creates a recipe, and performs the recipe so as to process a substrate. The substrate processor has a display unit 47. The recipe editing picture in an arbitrary step and the individual control parameter setting picture at every step of the recipe are displayed on the display unit. The picture is moved to the individual control parameter setting picture with a prescribed operation on the recipe editing picture in the arbitrary step. At least the step number is displayed on the individual control parameter setting picture. COPYRIGHT: (C)2006,JPO&NCIPI
|
