| 摘要 |
An input matching parallel inductor 114 which utilizes a spiral inductor, and an input matching parallel capacitor 115 which utilizes an MIM capacitor, both being constituting elements of an input matching circuit portion 125 , form an input matching parallel capacitor 115 inside an input matching circuit via-hole 121 being formed by applying a method of surface via-hole to the front surface of a GaAs substrate 124 . A choke inductor 119 which utilizes a spiral inductor, and a bypass capacitor 120 which utilizes an MIM capacitor, both being constituting elements of a drain voltage feeding circuit 107 , form a bypass capacitor 120 inside a drain voltage feeding circuit via-hole 123 formed by applying a method of surface via-hole to the front surface of the GaAs substrate 124 . A drain voltage terminal 136 is extended by a drawing wire 135 from between the spiral inductor and the drain voltage feeding circuit via-hole 123.
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