| 摘要 |
<p>A member for supporting a thin film coated board, by which dust generation due to particles and the like can be sufficiently suppressed, and a storing container, which is suitable for storing the thin film coated board, is provided with the supporting member and stores the thin film coated board while keeping the thin film coated board at a high cleanliness. The supporting members (2, 5) are provided with a supporting means for supporting the thin film coated board (1), such as a mask blank. The surface of at least a portion of the supporting means that comes into contact with the thin film coated board (1) is permitted to be a smooth plane having an arithmetic average surface roughness (Ra) of 0.1µm or less. The surface of at least the portion of the supporting means that comes into contact with the thin film coated board (1) is composed of, for instance, a resin material. In the storing container provided with the supporting member for supporting the thin film coated board (1) in a fixed status, the thin film coated board (1) is supported by using the supporting members (2, 5).</p> |
