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发明名称
VERFAHREN UND VORRICHTUNG ZUM ELEKTRISCHEN NULLPUNKTABGLEICH FÜR EIN MIKROMECHANISCHES BAUELEMENT
摘要
申请公布号
DE50108760(D1)
申请公布日期
2006.04.06
申请号
DE20015008760
申请日期
2001.06.01
申请人
ROBERT BOSCH GMBH
发明人
TANTEN, LEO;FRANZ, JOCHEN;SCHOEFTHALER, MARTIN;ROHR, MARIUS;EMMERICH, HARALD;HAUTE, MATTHIAS;WALKER, THOMAS
分类号
G01P15/13;G01C19/56;G01P15/125;G01P21/00
主分类号
G01P15/13
代理机构
代理人
主权项
地址
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