| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for supplying a stable amount of a raw organometallic material to be paid off, and to provide a device therefor. SOLUTION: The method for supplying a raw organometallic material includes: accommodating the liquid or solid organic metal 3 in a vessel 1 immersed in a constant-temperature bath 5 filled with a refrigerant 4; and introducing a gas into the vessel 1 to pay off the organic metal 3 together with the gas from the vessel 1 as vapor, wherein the vessel 1 is made to vibrate to prevent the deposition of the organic metal and stabilize the amount of the organic metal to be paid off. COPYRIGHT: (C)2006,JPO&NCIPI
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