| 发明名称 |
Elektrostatische Haltevorrichtung und Herstellungsverfahren derselben |
| 摘要 |
An electrostatic chuck member comprises a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al2O3.TiO2 based spray-coated layer containing a TinO2n-1 (n=1-9) type compound, and has a large volume resistivity and a less scattering thereof and a stable quality. |
| 申请公布号 |
DE69635745(D1) |
申请公布日期 |
2006.04.06 |
| 申请号 |
DE1996635745 |
申请日期 |
1996.08.22 |
| 申请人 |
TOCALO CO. LTD., KOBE |
发明人 |
HARADA, YOSHIO;TAKEUCHI, JUNICHI |
| 分类号 |
H01L21/68;B23Q3/15;C01G23/04;C23C4/10;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;H01L21/683;H02N13/00 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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