| 摘要 |
<p>The present invention provides a method to planarizing a nonplanar substrate (12) with a multilayer template (42) composed of a substrate (44) and in imaging layer (46), which is spaced apart from the substrate (12), having a liquid (14) disposed thereon (10) and is between the template imaging surface and the substrate's nonplanar surface. The method includes contacting the surface (15) of the liquid with the template, thus forming a first shape therein, and then impinging radiation upon the liquid causing a reduction in volume of the liquid, with the first shape compensating for the reduction in volume, such that when impinging the radiation upon the liquid, the liquid forms a contoured layer having a substantially planar surface (15).</p> |
