发明名称 |
METHOD FOR MANUFACTURING MICROLENS ARRAY, PHOTOSENSITIVE RESIN COMPOSITION FOR MICROLENS ARRAY, AND PHOTOSENSITIVE ELEMENT FOR MICROLENS ARRAY |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a microlens array by which a microlens array having lenses of desired curvatures can be manufactured with high yield. <P>SOLUTION: The method for manufacturing a microlens array includes: (I) a photosensitive layer forming step of forming a photosensitive layer comprising a photosensitive resin composition on one surface of a substrate which is transparent to specified active rays; (II) an exposing step of irradiating the photosensitive layer with active light through a predetermined photomask from the opposite side of the substrate to the surface where the photosensitive layer is applied; and (III) a developing step of removing an unexposed portion of the photosensitive layer by developing. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006091537(A) |
申请公布日期 |
2006.04.06 |
申请号 |
JP20040278009 |
申请日期 |
2004.09.24 |
申请人 |
HITACHI CHEM CO LTD |
发明人 |
MUKAI IKUO;NOJIRI TAKESHI;YOSHIDA TAKESHI |
分类号 |
G02B3/00;G03F7/031;G03F7/039 |
主分类号 |
G02B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|