发明名称 METHOD FOR MANUFACTURING MICROLENS ARRAY, PHOTOSENSITIVE RESIN COMPOSITION FOR MICROLENS ARRAY, AND PHOTOSENSITIVE ELEMENT FOR MICROLENS ARRAY
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a microlens array by which a microlens array having lenses of desired curvatures can be manufactured with high yield. <P>SOLUTION: The method for manufacturing a microlens array includes: (I) a photosensitive layer forming step of forming a photosensitive layer comprising a photosensitive resin composition on one surface of a substrate which is transparent to specified active rays; (II) an exposing step of irradiating the photosensitive layer with active light through a predetermined photomask from the opposite side of the substrate to the surface where the photosensitive layer is applied; and (III) a developing step of removing an unexposed portion of the photosensitive layer by developing. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006091537(A) 申请公布日期 2006.04.06
申请号 JP20040278009 申请日期 2004.09.24
申请人 HITACHI CHEM CO LTD 发明人 MUKAI IKUO;NOJIRI TAKESHI;YOSHIDA TAKESHI
分类号 G02B3/00;G03F7/031;G03F7/039 主分类号 G02B3/00
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