| 摘要 |
PROBLEM TO BE SOLVED: To provide a grid cleaning device for surely cleaning the grid while keeping a grid and a cleaning member in an excellent press contact state. SOLUTION: The grid cleaning device cleans the grid 12 by bringing a grid cleaning member 16 into press contact with the grid 12, and the grid cleaning member 16 is attached to a holding member so as to differentiate press contact force applied to the grid 12 in a direction orthogonal to a grid disposing direction at the time of being in the press contact with the grid 12. Since the press contact force applied to the grid 12 is adjusted in the direction orthogonal to the grid disposing direction, the grid cleaning member is applied to the grid so as not to deform the grid. Thus, while the grid and the grid cleaning member are kept in the excellent press contact state, the grid is surely cleaned. COPYRIGHT: (C)2006,JPO&NCIPI
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