METHOD FOR FABRICATING RESONANCE VIBRATION DEVICE

摘要

A method for fabricating a resonance vibration device in which a structure consisting of a support, a vibratory beam extending from the support, and a vibration element supported by the beam to perform resonance vibration as the beam vibrates is formed integrally using a substrate, and a piezoelectric element for driving the beam to vibrate is formed on the beam with a structure of interposing a piezoelectric film between opposite electrodes. The fabrication method comprises a step for measuring the thickness of the substrate, a step for determining the deposition conditions of the piezoelectric film based on the thickness of the substrate measured in the step for measuring the thickness such that the frequency by resonance vibration of the vibration element has a desired resonance frequency, and a step for forming the piezoelectric element based on the deposition conditions of the piezoelectric film determined in the step for determining the deposition conditions of the piezoelectric film.