| 摘要 |
<p>A substrate inspecting apparatus is provided with a substrate holder (6) for holding a substrate (W). The substrate holder (6) is provided with a plurality of supporting arm parts (10), which extend parallel to each other at equal intervals from a base part (7) attached to a multijoint robot (8) and have a comb teeth shape as a whole. On an upper plane (10a) of each supporting arm part (10), a suction part (12) is arranged for holding the substrate (W) by suction. Furthermore, on each of the sides of a base end part (11a) and the leading end part (11b) of the supporting arm part (10), a bar (15) is attached, and on the outer plane of the external supporting arm part (10), a bar (17) is attached. The side edges of the substrate (W) are held by the bars (15, 17).</p> |
