| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact mirror control circuit superior in responsibility and control accuracy. <P>SOLUTION: A MEMS mirror control circuit 100 which generates a control signal to be inputted into a MEMS mirror 10 and comprises a control signal generating circuit 110 and a compensating circuit 120. The control signal generating circuit 110 generates a signal showing the target value of the deflection of the MEMS mirror 10. The compensating circuit 120 has a compensating transfer function proportional to the reciprocal of the transfer function of the MEMS mirror 10 and generates a signal for controlling the MEMS mirror 10 by inputting a signal outputted from the control signal generating circuit 110 to its compensating transfer function. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
