| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical system capable of matching so as to provide a desired wavefront profile and correcting static and dynamic surface errors without using an active adjustment element; and to provide an optical system, a beam expansion assembly, a line width reducing module and a laser, having improved optical characteristics such as, in case of the laser, the width of a sandwiched line at high power and a substantially flat wavefront. SOLUTION: For the beam expansion assembly 20, a refractive optical element contains at least one prism having a wavefront correction optical surface 29 from a set of prisms 22 configured so as to expand beams. For the laser, a resonator arranged in a beam path 28 and at least one refractive optical element are provided, the refractive optical element has the wavefront correction optical surface. COPYRIGHT: (C)2006,JPO&NCIPI
|
