发明名称 Acoustic resonator performance enhancement using alternating frame structure
摘要 Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
申请公布号 US2006071736(A1) 申请公布日期 2006.04.06
申请号 US20050159753 申请日期 2005.06.23
申请人 发明人 RUBY RICHARD C.;FAZZIO RONALD S.;FENG HONGJUN;BRADLEY PAUL D.
分类号 H03H9/54 主分类号 H03H9/54
代理机构 代理人
主权项
地址