PIEZOELECTRIC/ELECTROSTRICTION FILM TYPE ELEMENT AND PRODUCTION METHOD THEREFOR

摘要

A piezoelectric/electrostriction film type element (1) provided with a thin ceramic substrate (2) and a piezoelectric/electrostriction operation unit (5) consisting of a lower electrode film (3a), a piezoelectric/electrostriction film (4) containing many crystal particles of piezoelectric/electrostriction composition and an upper electrode film (3b) that are disposed and sequentially laid on the substrate (2). The piezoelectric/electrostriction composition contains at least one alkali metal element selected from a group consisting of lithium (Li), potassium (K) and sodium (Na) and at least one metal element selected from a group consisting of niobium (Nb), tantalum (Ta), antimony (Sb) and silver (Ag) (note: niobium (Nb) must be contained), and the circle-equivalent diameter of crystal particles amounting to at least 90% of the many crystal particles is 0.3-50µm. The element is free from lead (Pb), exhibits excellent piezoelectric/electrostriction characteristics, and can provide especially a large displacement.