FERROELECTRIC POLYMER MEMORY DEVICE INCLUDING POLYMER ELECTRODES AND METHOD OF FABRICATING SAME

摘要

A method of fabricating a ferroelectric memory module with conducting polymer electrodes, and a ferroelectric memory module fabricated according to the method.The ferroelectric polymer memory module includes a first set of layers including: an ILD layer defining trenches therein; a first electrode layer disposed in the trenches; a first conductive polymer layer disposed on the first electrode layer; and a ferroelectric polymer layer disposed on the first conductive polymer layer. The module further includes a second set of layers including: an ILD layer defining trenches therein; a second conductive polymer layer disposed in the trenches of the ILD layer of the second set of layers; and a second electrode layer disposed on the second conductive polymer layer. The first conductive polymer layer and the second conductive polymer layer cover the electrode layers to provide a reaction and/or diffusion barrier between the electrode layers and the ferroelectric polymer layer.