摘要 |
PROBLEM TO BE SOLVED: To provide a plane sensor which is expansible in a planar direction and deformable into a curved surface. SOLUTION: By manufacturing a plurality of aperture sections 24 with each of approximately rectangular shape formed in a thin film made of a polymer material, and a plurality of element-forming sections 26 are made cross-linked by using a plurality of cross-linking sections 28, thereby making up a net-like planar member 22. Pressure sensor elements 30 are formed on the plurality of element-forming sections 26 of the planar member 22, and wiring conductors to the pressure sensor elements 30 are formed on the cross-linking sections 28. The net-like formation allows the planar member to expand in a diagonal direction in which the cross-linking sections 28 are not formed, and to be deformed so as to have the curved surface. As a result, it also can be attached to a curved surface, such as a spherical surface made up, by using curved lines. COPYRIGHT: (C)2006,JPO&NCIPI |