| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for supplying a raw material capable of charging a solid raw material causing no crystal contamination evenly in circumference direction and in a large quantity. SOLUTION: This apparatus for supplying a raw material is used in a Czochralski(CZ) method for growing a single crystal to replenish or recharge the raw material, and provided with a cylindrical raw material supply pipe in which the solid raw material is filled, a conical bottom lid detachably installed at the lower opening end of the raw material supply pipe, a metallic support member connected to the bottom lid and penetrating through the inside of the raw material supply pipe while covered by a protector tube, which enables descending of the bottom lid and ascending of the raw material supply pipe and the bottom lid, a locking member for halting the descending of the raw material supply pipe, and a pull-up means for hanging the raw material supply pipe and the bottom lid through the metallic support member and enabling their ascending/descending. COPYRIGHT: (C)2006,JPO&NCIPI |
