| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for detecting a reference position and a positional shift in the lateral direction of a substrate and correcting the positional shift in carrying in the substrate on a substrate transfer-loading robot device in the case of holding the rectangular substrate in the stationary state and conveying the same to another position by rectilinear operation. SOLUTION: This substrate transfer-loading robot device 1 holds a glass substrate W in the stationary state and conveys the same. A base part 100 of the device includes a sensor for detecting the reference position and a positional shift value from the substrate position on the robot device in the state where the glass substrate is positioned on the transfer-loading surfaces of hands H1, H2 and moved to the standby position on the robot, thereby controlling the drive in carry-in operation. COPYRIGHT: (C)2006,JPO&NCIPI |
