| 摘要 |
PROBLEM TO BE SOLVED: To heighten efficiency of an inspection work using a general-purpose inspection device, to shorten an inspection time, and to reduce inspection cost, by enabling simultaneous inspection by combining flexibly different kinds of semiconductor devices. SOLUTION: This inspection board is divided into a general-purpose inspection board 14 and inspection boards 12, 13 for mounting, and the inspection boards 12, 13 for mounting can be mounted on optional positions on the general-purpose inspection board 14 (mountably on/dismountably from optional positions). If the inspection boards 12, 13 for mounting are prepared beforehand relative to each kind of semiconductor devices, simultaneous inspection of various kinds of semiconductor devices can be performed only by mounting properly proper inspection boards 12, 13 for mounting on the general-purpose inspection board 14 on condition that the capacity of a semiconductor inspection device 11 is not exceeded. COPYRIGHT: (C)2006,JPO&NCIPI
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