| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchemical chip which can be manufactured at a low cost, contains less impurity, and has stable performance for realizing various mounting forms. SOLUTION: This microchemical chips is provided with: a semiconductor substrate 1 having a cavity on the inside; a first flow passage 2 formed from the cavity to the principal surface of the semiconductor substrate 1; a micro electromechanical system 3 arranged in the cavity; an electrode 4 arranged on the principal surface of the semiconductor substrate 1; an electrical insulating member 5 arranged on the principal surface of the semiconductor substrate 1; a metallic external connection member 6 connected to the electrical insulating member 5; a second flow passage 9 formed inside the electrical insulating member 5; a first connection material 10 which connects an opening 7 of the first flow passage 2 to one open end 8 of the second flow passage 9 while airtightly surrounding the opening 7 and one open end 8 to allow the first flow passage 2 to communicate with the second flow passage 9; and a second connection material 13 which connects the other open end 8 of the second flow passage 9 to one open portion of a third flow passage 12, which is formed in the external connection member 6, while airtightly surrounding the other open end 8 and one open portion to allow the second flow passage 9 to communicate with the third flow passage 12. COPYRIGHT: (C)2006,JPO&NCIPI
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