| 发明名称 |
Actuator and method of making the same |
| 摘要 |
The actuator (1) in accordance with the present invention is provided with a pair of arms (12) and a connecting part (15) for connecting them to each other. The arms (12) and connecting part (15) are integrally formed from single-crystal silicon. Respective piezoelectric devices (30) are attached to the arms (12). |
| 申请公布号 |
EP1424738(A3) |
申请公布日期 |
2006.04.05 |
| 申请号 |
EP20030027347 |
申请日期 |
2003.11.26 |
| 申请人 |
TDK CORPORATION |
发明人 |
MIYANO, MASAICHI;HOMMA, MITSUNAO |
| 分类号 |
H01L41/04;H01L41/09;G11B5/55;H01L41/08;H01L41/22;H01L41/25;H01L41/313;H01L41/39 |
主分类号 |
H01L41/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
