发明名称 INTEGRATED COOLANT CIRCUIT ARRANGEMENT, OPERATING METHOD AND PRODUCTION METHOD
摘要 An integrated circuit arrangement and method of fabricating the integrated circuit arrangement is provided. At least one integrated electronic component is arranged at a main area of a substrate. The component is arranged in the substrate or is isolated from the substrate by an electrically insulating region. Main channels are formed in the substrate and arranged along the main area. Each main channel is completely surrounded by the substrate transversely with respect to a longitudinal axis. Transverse channels are arranged transversely with respect to the main channels. Each transverse channel opens into at least one main channel. More than about ten transverse channels open into a main channel.
申请公布号 EP1642335(A1) 申请公布日期 2006.04.05
申请号 EP20040741804 申请日期 2004.06.15
申请人 INFINEON TECHNOLOGIES AG 发明人 LEHMANN, VOLKER;STENGEL, REINHARD;SCHAEFER, HERBERT
分类号 H01L21/306;H01L21/3063;H01L23/427;H01L23/473;(IPC1-7):H01L23/473 主分类号 H01L21/306
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