Process and apparatus for light inducing chemical treatment of a workpiece

摘要

The chemical treatment device has a chamber with at least one inlet and at least one outlet for a material (19) for chemical treatment of a workpiece arranged in the chamber. At least one section of the chamber wall is formed by a light transmitting optical imaging plate (12) for forming an image of an illumination pattern on the surface of the workpiece in the chamber. AN Independent claim is also included for the following: (a) a method of light induced chemical treatment of a workpiece.