发明名称 |
METHODS OF FINISHING QUARTZ GLASS SURFACES AND COMPONENTS MADE BY THE METHODS |
摘要 |
Methods of surface finishing a component useful for a plasma processing apparatus are provided. The component includes at least one plasma-exposed quartz glass surface. The method includes mechanically polishing, chemically etching and cleaning the plasma-exposed surface to achieve a desired surface morphology. Quartz glass sealing surfaces of the component also can be finished by the methods. Plasma-exposed surface and sealing surfaces of the same component can be finished to different surface morphologies from each other. |
申请公布号 |
EP1641719(A2) |
申请公布日期 |
2006.04.05 |
申请号 |
EP20040776150 |
申请日期 |
2004.05.28 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
KIEHLBAUCH, MARK, W.;DAUGHERTY, JOHN, E. |
分类号 |
C03C19/00;C03C15/00;C03C23/00 |
主分类号 |
C03C19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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