Life predictive apparatus for a target of sputtering equipment and its operating method,申请号KR20030066567-传众专利搜索

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发明名称	Life predictive apparatus for a target of sputtering equipment and its operating method
摘要
申请公布号	KR100567745(B1)	申请公布日期	2006.04.05
申请号	KR20030066567	申请日期	2003.09.25
申请人		发明人
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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