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发明名称
Structure And Method For Isolation Of Semiconductor Device
摘要
申请公布号
KR100568028(B1)
申请公布日期
2006.04.05
申请号
KR20030067829
申请日期
2003.09.30
申请人
发明人
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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