发明名称 Methods for forming aluminum-containing p-contacts for group III-nitride light emitting diodes
摘要 A flip-chip LED device ( 10 ) includes a plurality of group III-nitride semiconductor layers ( 22 ) defining a p/n junction and including a top p-type group III-nitride layer ( 28 ), and a p-contact ( 30, 30', 30'' ) for flip-chip bonding the top p-type group III-nitride layer. The p-contact includes an aluminum layer ( 32 ) disposed on the top p-type group III-nitride layer ( 28 ), and an interface layer ( 40, 66, 72, 80 ) disposed between the aluminum layer and the top p-type group III-nitride layer. The interface layer reduces a contact resistance between the aluminum layer ( 32 ) and the top p-type group III-nitride layer ( 28 ). The interface layer comprises one or more group III-nitride layers.
申请公布号 US7022550(B2) 申请公布日期 2006.04.04
申请号 US20040819740 申请日期 2004.04.07
申请人 GELCORE LLC 发明人 VENUGOPALAN HARI S.
分类号 H01L21/44;H01L23/48;H01L33/20;H01L33/32;H01L33/38;H01L33/40 主分类号 H01L21/44
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