| 摘要 |
A sensor includes at least two microsensor chips in a housing. The chips may be arranged as (i) an absolute thermal conductivity sensor by exposing one chip to a sample fluid and the other chip to a sealed reference fluid, (ii) a differential thermal conductivity sensor by exposing the two chips to a sample fluid before and after it is modified, respectively, (iii) a one-axis rotation sensor by exposing both chips, positioned at an angle of 180° relative to one another, to a rotational flow in a toroidal chamber, (iv) a two or three axis rotation sensor by placing the two chips or three such chips on two or three orthogonal faces of a cube, (v) a one axis orientation/tilt/acceleration sensor by exposing the two chips to a fluid in a sealed toroidal chamber and by mounting the chips at an angle of substantially 90° relative to one another, (vi) a two axis orientation/tilt/acceleration sensor by placing the two chips at an angle of 90° relative to one another in a fluid filled chamber substantially without inertial flow, and (vii) a combined tilt/rotation sensor based on above (iii) by periodically adding and subtracting the signals from the two chips.
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