发明名称 |
Method and device for observing a specimen in a field of view of an electron microscope |
摘要 |
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.
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申请公布号 |
US7022989(B2) |
申请公布日期 |
2006.04.04 |
申请号 |
US20040800872 |
申请日期 |
2004.03.16 |
申请人 |
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发明人 |
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分类号 |
G01N23/00;G01N23/04;G01N23/225;G06T1/00;G06T7/60;H01J37/22;H01J37/26 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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