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发明名称
METHOD OF FORMING GATE OXIDES OF SEMICONDUCTOR DEVICE WITH DIFFERENT THICKNESS FROM EACH OTHER
摘要
申请公布号
KR20060028992(A)
申请公布日期
2006.04.04
申请号
KR20040077939
申请日期
2004.09.30
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, SEONG GEON;KANG, SANG BOM;SHIN, YU GYUN
分类号
H01L21/8242;H01L21/31;H01L21/336;H01L27/108
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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