发明名称 CERIUM BASED ABRASIVE MATERIAL AND ABRASIVE MATERIAL SLURRY, AND METHOD FOR PRODUCING CERIUM BASED ABRASIVE MATERIAL
摘要 There is provided a cerium-based abrasive containing cerium oxide as a main component, in which the abrasive particles composing the abrasive are coated with a coating layer containing at least either one of a silicon component of silicon or a silicon compound and an aluminum component of aluminum or an aluminum compound. The cerium-based abrasive can be produced by wet-dispersing the cerium-based abrasive in a dispersion medium to obtain a slurry and carrying out surface treatment by adding a treatment solution containing at least either one of the silicon compound and the aluminum compound to the slurry. Further, the cerium-based abrasive can be produced by carrying out surface treatment by adding a treatment solution containing at least either one of the silicon compound and the aluminum compound to the slurry during the pulverization step or after the pulverization step in the conventional cerium-based abrasive production process and after that roasting and classifying the obtained cerium-based abrasive.
申请公布号 KR100567678(B1) 申请公布日期 2006.04.04
申请号 KR20037011602 申请日期 2003.09.04
申请人 发明人
分类号 C09K3/14;B24B37/00;C09C1/68;C09G1/02;H01L21/304 主分类号 C09K3/14
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