发明名称 Crystal growth method of nitride semiconductor
摘要 The present invention relates to a method of manufacturing a nitride semiconductor, and, more particularly, a crystal growth method of a nitride semiconductor wherein a nitride semiconductor are grown on a nitride buffer layer including aluminums so that it is possible to improve electrical and crystalline characteristics.
申请公布号 US7023025(B2) 申请公布日期 2006.04.04
申请号 US20040765100 申请日期 2004.01.28
申请人 LG.ELECTRONICS INC. 发明人 SHIN JOHNGEON
分类号 H01L21/205;C30B23/02;C30B25/02;C30B25/18;H01L21/20;H01L33/00 主分类号 H01L21/205
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