发明名称 Field-effect transistor with horizontal self-aligned gates and the production method therefor
摘要 A field-effect transistor including: a support substrate, an active area forming a channel; a first active gate which is associated with a first face of the active area; source and drain areas which are formed in the active area and which are self-aligned on the first gate; a second insulated gate which is associated with a second face of the active region opposite the first face of the active region. According to the invention, the second gate is self-aligned on the first gate and, together with the first gate, forms a mesa structure on a support substrate.
申请公布号 US7022562(B2) 申请公布日期 2006.04.04
申请号 US20040486369 申请日期 2004.03.02
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 DELEONIBUS SIMON
分类号 H01L21/336;H01L21/8234;H01L29/786 主分类号 H01L21/336
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