| 发明名称 |
POLISHING APPARATUS |
| 摘要 |
|
| 申请公布号 |
KR100566760(B1) |
申请公布日期 |
2006.03.31 |
| 申请号 |
KR20007007969 |
申请日期 |
2000.07.20 |
| 申请人 |
|
发明人 |
|
| 分类号 |
B24B37/00;H01L21/304 |
主分类号 |
B24B37/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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