GRINDING METHOD OF WORK AND GRINDING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a grinding device capable of decreasing a total moving distance sum of a work table in grinding a work, in which a grinding wheel can reverse at a distance where the work table has moved by about 20 to 75 mm more from a position separated from the work by using a vibration sensor. SOLUTION: In the method to grind a surface of the work 2 by using the grinding wheel 3A, a vibration sensor head 40 set on a chuck surface in the neighborhood of the work detects a vibration signal generated from an interference region of the grinding wheel and the work, the work table 4 is made to proceed in one direction when this vibration signal value Eiis higher than a trigger value E0of the previously set vibration signal and the work table 4 is reversed by sending a reversing signal to a driving means of the work table when the vibration signal value Eireaches lower than the trigger value E0of the previously set vibration signal. It is possible to reduce an idle moving distance of the table 4 when the work is not ground. COPYRIGHT: (C)2006,JPO&NCIPI