| 摘要 |
Process for protectively coating against aggressive liquids hydraulic microcircuits made in a resin ( 32 ), particularly for an ink jet printhead, consisting of: a9 disposing of a silicon substrate ( 20 ) comprising a sacrificial layer ( 26 ) of copper, deposited on the substrate and defining the inner shape of the hydraulic microcircuits ( 35, 36, 37 ); b) depositing on top of the outer surface of the sacrificial layer ( 26 ), by means of an electrochemical process, at least one protective, metallic coating layer ( 30 ); c) applying on the sacrificial layer ( 26 ) a non-photosensitive epoxy or polyamide resin ( 32 ), having a predetermined thickness and suitable for completely covering the sacrificial layer ( 26 ); d) effecting a polymerization of the resin ( 32 ) to increase its mechanical resistance to mechanical and thermal stresses and performing a planarization of the outer surface ( 33 ) of the resin ( 32 ), by means of a mechanical lapping and simultaneous chemical treatment; e) removing the sacrificial layer ( 26 ) through a chemical etching, in a highly acid bath; f) depositing a metallic, protective layer ( 39 ) on the outer surface ( 33 ) of the resin ( 32 ), through vacuum evaporation.
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