发明名称 |
System and method for aligning wafers |
摘要 |
Systems and methods for aligning wafers. A first method provides for placing a wafer carrier comprising a mis-aligned wafer into an acceptance port. A wafer alignment fixture is moved relative to the wafer carrier and perpendicular to the plane of the mis-aligned wafer. The wafer alignment fixture comprises a spring action member. A force from said spring action member is exerted upon the mis-aligned wafer to achieve a desirable alignment of the mis-aligned wafer within the wafer carrier.
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申请公布号 |
US2006066333(A1) |
申请公布日期 |
2006.03.30 |
申请号 |
US20040956801 |
申请日期 |
2004.09.30 |
申请人 |
FENG JIAN-HUEI;GUTHRIE HUNG-CHIN;NYSTROM JAMES |
发明人 |
FENG JIAN-HUEI;GUTHRIE HUNG-CHIN;NYSTROM JAMES |
分类号 |
G01R31/02 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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