| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink-jet recording head high in energy efficiency by making an electrical connection part of an ejector substrate, in which a plurality of liquid droplet ejectors are arranged, and a driving circuit substrate compact. SOLUTION: Many liquid droplet ejectors 30 are two-dimensionally arranged to the ejector substrates 16, 18 of a head unit 14. A pressure chamber 50 and a nozzle 24 are arranged to each liquid droplet ejector 30 respectively. A piezoelectric element 48 is provided to the upper part of a vibrating plate 46 in the pressure chamber 50. The driving circuit substrate 60 is arranged at a position facing the ejector substrates 16, 18. An electrode terminal 62 and an electrode pad 56 on the piezoelectric element 48 are connected by a spring-like conductive member 58. When a voltage is impressed to the piezoelectric element 48 from the driving circuit substrate 60, ink droplets are discharged from the nozzle 24 by the deformation of the vibrating plate 46. On that occasion, the spring-like conductive member 58 is expanded/contracted. Thus, the deformation of the piezoelectric element 48 and the vibrating plate 46 is not constrained. COPYRIGHT: (C)2006,JPO&NCIPI
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