发明名称 |
Supercritical fluid processing system having a coating on internal members and a method of using |
摘要 |
A processing system utilizing a supercritical fluid for treating a substrate is described as having internal members having a coating. For example, the coating in internal members can reduce particulate contamination during processing. Additionally, a method for using the processing system is described.
|
申请公布号 |
US2006065288(A1) |
申请公布日期 |
2006.03.30 |
申请号 |
US20040955927 |
申请日期 |
2004.09.30 |
申请人 |
BABIC DARKO;WHITE CARL L;SHEYDAYI ALEXEI |
发明人 |
BABIC DARKO;WHITE CARL L.;SHEYDAYI ALEXEI |
分类号 |
C23G1/00;B08B3/12;B08B5/04 |
主分类号 |
C23G1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|