Raman probe for measuring the Raman effect in solid bodies and during semiconductor crystal growth processes has coupling prisms, compound lenses and a narrow band pass filter arranged between the last two compound lenses

摘要

Raman probe for measuring the Raman effect in solid bodies and during semiconductor crystal growth processes comprises a laser light source and measurement and evaluation units. Two prisms (2, 3) are provided to couple the laser light from a sample (4) into the measurement optical system. The measurement unit comprises four aberration correcting compound lenses (5, 7, 8, 10), three having a positive focal length and one a negative. Finally a narrow band pass filter (9) is mounted between the third and fourth compound lenses.