| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a molybdenum disilicide based ceramic heating element manufacturable without passing through complicated processes, and excellent in oxidation resistance and strength characteristics. <P>SOLUTION: This molybdenum disilicide based ceramic heating element is equipped with a processed part processed in high temperatures by using high frequency induction heating, or a bonded part bonded in high temperatures by using high frequency induction heating. Preferably, the heating part of the heating element and the entire surface area of a terminal part excluding an electrode part at the end part is coated with a silicon (Si) based oxide by using high frequency induction heating. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
