| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration chip in which vibration balance is improved and a CI value is suppressed to be low, and to provide a piezoelectric device and a method of manufacturing the piezoelectric device. <P>SOLUTION: A piezoelectric vibration chip is provided with a base 51 formed of a piezoelectric material, a plurality of vibration arms 34, 35 formed integrally with this base and each extending in parallel from the base, long grooves 56, 57 extending in a lengthwise direction formed on each of the vibration arms, and a driving electrode. A lid member 41 formed of a material having strength approximate to that of the piezoelectric material is joined to the ends of both side walls sandwiching each of the long grooves. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
