| 摘要 |
PROBLEM TO BE SOLVED: To provide a nano-granular soft magnetic film which has large electric resistivity and amplified anisotropic magnetic field, and is expected to be used in an ultra-high frequency region of about 10 GHz, and to provide its manufacturing method. SOLUTION: A nano-granular soft magnetic film is manufactured with ferromagnetic particle of an average grain diameter of 10 nm or less mainly constituted of at least one kind of Fe or Co. The particle is embedded in a matrix consisting of ceramics of nitride, oxide or the like for manufacturing the nano-granular soft magnetic film. Thereafter, in vacuum, anisotropic magnetic field is amplified by carrying out thermal treatment under an application of ferromagnetic field of in-plane direction of 0.1 T or more. COPYRIGHT: (C)2006,JPO&NCIPI
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