Laminated magnetic thin film and method of manufacturing the same

摘要

A laminated magnetic thin film has a laminated structure in which insulating layers and granular layers are formed alternately on a substrate. The insulating layers are formed of SiO₂ films. The granular layers are formed of FeNiSiO films and have a structure in which an insulator is present in grain boundaries so as to wrap magnetic particles. It is possible to improve insulating properties of the insulating layers and the insulators and increase resistivity thereof by heating the substrate at the time of film formation. It is possible to control deterioration of a magnetic characteristic due to an increase in a resistivity and realize both a high magnetic characteristic and a high resistivity by changing thicknesses of the insulating layers and the magnetic layers and a ratio of the magnetic particles to the insulator to optimize a diameter of the magnetic particles having a composition within a predetermined range.